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  3. 3 a heater for a semiconductor wafer has firstorder dynamics...

Question: 3 a heater for a semiconductor wafer has firstorder dynamics...

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3) A heater for a semiconductor wafer has first-order dynamics relating changes in the temperature T to changes in the heater input power level P. The process is at steady-state when an engineer changes the power input stepwise from 1 to 2 kW The process temperature initially is 100°C. Four minutes after changing the power input, the temperature is 400°C. Thirty minutes later, the temperature is 500c a) What are the gain and time constant in the process transfer function T(s)/P(s)? What are the units of the gain and the time constant? b) If at another time, the engineer changes the power input linearly at a rate of 0.5 kW/min, what can you say about the maximum rate of change of process temperature in terms of when wil it occur and how large wil it be?
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