Question: hy everyone i need this as typed format leave q...
I need this as typed format
leave q no 4
Don't copy from internet please
1) Discuss the advantages and disadvantages of
2) Discuss how forward scattering, backscattering and second electron generation impacts resolution of electron-beam lithography? What causes the proximity effect in electron-beam lithography?
3) Do thinner resists layers improve or degrade lithography resolution? Explain.
4) 6 (c ) in Chapter 9
5) What are the relative advantages of thermionic emission sources for high- resolution direct-write electron-beam lithography?